Boron trifluoride, an inorganic compound with the chemical formula BF3, has the appearance of colorless gas, irritating odor, toxicity, corrosiveness and asphyxiation. Boron trifluoride is soluble in cold water, soluble in some organic solvents, easily hydrolyzed, and can decompose in humid air to produce highly toxic fluoride fumes, and will decompose into fluoroboric acid and boric acid by violent reaction when it meets water, which can erode glass and corrode many kinds of metals, and can react violently when it meets organic substances. Boron trifluoride is a hazardous chemical.
Boron trifluoride is mainly prepared by the reaction of boron trioxide/borate and hydrogen fluoride; by the reaction of boron and fluorine; by the reaction of boron-carbon mixture and fluorine gas; by the reaction of borax and fluorite mixture with concentrated sulfuric acid; by the reaction of boric anhydride and potassium fluoroborate with concentrated sulfuric acid; and by the thermal decomposition of sodium fluoroborate.
Boron trifluoride can be used as semiconductor material, rocket high-energy fuel, organic synthesis catalyst, boron isotope separation raw material, chemical synthesis raw material, metal alloy antioxidant, epoxy resin curing agent, etc. High purity boron trifluoride can be used in the semiconductor industry for applications such as doping, ion implantation, oxide diffusion, plasma etching, silicon/germanium epitaxial growth, etc. Doping is one of the important application areas of boron trifluoride, which is a commonly used boron doping product to enhance the electrical properties of silicon wafers and is mainly used in the production of P-type semiconductors.
China's boron trifluoride research started in the 1950s, and the Bright Chemical Research and Design Institute was the first institution to research boron trifluoride, mainly for high-energy fuels. With the rapid development and expansion of China's semiconductor industry, the demand for electronic grade high purity boron trifluoride in China's market is rising. The technical barriers to the production of high purity boron trifluoride are high, and the number of domestic manufacturers is small and the production capacity is small.
In addition to the domestic enterprises, Japan's Dayang Nihon also entered China's boron trifluoride industry layout, its construction in Yangzhou electronic chemicals production line includes boron trifluoride products. New thinking industry analysts said, in general, China's boron trifluoride industry scale is small, especially the electronic grade boron trifluoride production capacity is weak, demand mainly relies on imports. The future of China's boron trifluoride industry has a large development space, but as a dangerous chemical, its production of enterprise technology, high qualification requirements, the strength of the weaker enterprises difficult to enter the layout.
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